| 摘要 |
PURPOSE:To improve the discharge efficiency and to obtain a desired degree of vacuum with a small-sized device by setting a collimator obliquely in a collimator chamber, and further setting a vacuum pump capable of sucking directly particles reflected on said inclined wall surface. CONSTITUTION:Raw gas whose flow rate is controlled is sent into a perticle beam generating chamber 6, and sent out from an ejection port 8 as a particle beam which is separated to a particle beam 16 necessary for crystal growth and an unnecessary beam 18 by a collimetor 42 in a collimator chamber 40. The particle beam 16 is struck against a substrate 32 provided in a growth chamber 30 of a main chamber 14, and crystals are grown. Meanwhile, unnecessary gas particles are discharged by a turbo-molecular pump 44. In said device, the collimater 42 is obliquely set, and the turbo-molecular pump 44 is equipped directly to the collimater chamber without interposing any pipe-lines, etc. in the direction of the movement of the unnecessary gas particles 18 which is reflected on the wall surface.
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