| 摘要 |
PURPOSE:To miniaturize an apparatus, to conserve fabrication cost while reducing operation cost, by receiving fluid supply means and fluid purification means in the same container through a partition wall in an integrated and partitioned state. CONSTITUTION:A pressure container 11 is partitioned into a fluid supply part 11A and a fluid purification part 11B by a partition wall 12 and, when the liquid in the container 11 is heated by a heater 13, temp. difference is generated in the inside and outside of the partition wall 12 and a natural recirculation stream is generated in the liquid of the container 11 between the fluid supply part 11A and the fluid purification part 11B as shown by the broken line and impurities are collected by the filter 15 of the fluid purification part 11B while thus purified liquid is supplied to a main loop from the fluid supply part 11A through piping 14. As a result, the apparatus is miniaturized and fabrication cost is conserved. By the miniaturization of the apparatus, when a fluid to be treated is solid at ambient temp., the power consumption of the heater 13 necessary for holding the whole of the apparatus to an m.p. or more is reduced and operation cost is reduced.
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