| 摘要 |
PURPOSE:To make full use of an exhaust characteristic effect to the maximum possible extent, by setting up a driving device, driving an outer rotor for rotation in a turbo-molecular pump, in position outward the outer rotor. CONSTITUTION:In case of a turbo-molecular pump forming proper numbered stages of cascades by means of an inner rotor 1 and an outer rotor 2, the outer rotor 2 is rotated and driven by driving devices 6 and 7 being set up an outward position in the extension direction free of c.w. or c.c.w. rotation around the shaft center. Therefore, shaft length size of the turbo-molecular pump in a double-rotation system by inner and outer rotors is made yet shorter and, what is more, the pump itself is able to be brought into such a structure that its inherent, excellent exhaust characteristic is no longer hampered.
|
