摘要 |
PURPOSE:To produce a transition metal-rare earth alloy target having high density in the stage of producing the alloy target for forming a thin transition metal-rare earth film by making the powder of a raw material mixture contg. the transition metal in the smaller amt. than the amt. of the target component then mixing the powder with the remaining transition metal powder and molding and sintering the mixture. CONSTITUTION:The transition metal such as Co or Fe is first mixed with the rare earth element such as Gd at a ratio smaller by about 1-10% than the prescribed target value in the stage of producing the target for forming the transition metal-rare earth alloy such as Co-Gd or Fe-Gd as the a thin magnetic film for an optomagnetic recording disk by a PVD method. Such mixture is melted in a non-contaminating atmosphere and is then cooled and crushed in an inert atmosphere consisting of Ar, etc. The remaining 1-10% transition metal such as Co or Fe which is deficient is added to such powder and the mixture composed thereof is sintered at a high temp. in an atmosphere consisting of He, Ar, etc. by which the target consisting of the transition metal-rare earth alloy having high density and high strength is produced.
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