| 摘要 |
PURPOSE:To level respective processing abilities of various apparatuses required for assembling a semiconductor device and thereby to enable semiconductor devices to be continuously assembled on the same production line, by providing each of the apparatus with a supply and discharge mechanism which supplies externally supplied assembly parts into the treating process inside the apparatus and discharges processed parts therefrom, disposing the processing apparatuses and stockers side by side, along a transporting path, and further providing a mobile robot for effecting loading and unloading assembly parts. CONSTITUTION:Processing apparatuses 1a-1f required for assembling a semiconductor device, a supply-side stocker 4a for storing assembly parts to be processed, and a discharge-side stocker 4b for storing assembly parts which have been processed are disposed side by side on both or either one of the sides of a transporting path 2 so that they face the path 2. A mobile robot 3 which transfers assembly parts among the processing apparatuses 1a-1f and the stockers 4a, 4b is provided so as to be able to reciprocate along the path 2. A rail 5 is laid in close proximity with the stockers 4a, 4b, and an unmanned transporting car 6 is provided so as to be able to travel on the rail 5, the car 6 being adapted to load assembly parts sent from a previous process into the supply-side stocker 4a and send assembly parts from the discharge- side stocker 4b to a subsequent process. In addition, each of the processing apparatuses is provided with a supply and discharge mechanism which supplies externally supplied assembly parts to the treating process inside the apparatus and returns processed parts therefrom. |
