| 摘要 |
PURPOSE:To form a uniform and thick film deposited by evaporation by ionizing and releasing the evaporating material from an evaporating source, providing a vessel-shaped shielding material having the electric charge of the same code as the code of the ionized particle groups in a vacuum vessel and dropping the particle groups onto a material for vapor deposition after rising upward said groups. CONSTITUTION:The shielding material 2 made into a vessel shape is provided into the vacuum vessel 1 and the evaporating material evaporated from the evaporating source provided in the lower part thereof is ionized by an ionizing device or ion cluster device 3 to form the ionized particle groups. The material 2 is impressed with the electric charge of the same code as the code of the ion- charged particle groups and therefore the particle groups ascend in the material 2 without sticking to the material 2 and falls upon arrival at the peak point. The falling particle groups are uniformly deposited by evaporation on a film- shaped material 4 for vapor deposition which travels below the material 2. |
