| 摘要 |
PURPOSE:To enable the uniform formation of nozzle parts and the high density arrangement thereof, by a method wherein grooves are formed to a glass substrate and wires or pins formed of a material different from that of the substrate are arranged to said grooves and a glass substrate is applied to the grooved glass substrate as a lid to be thermally fused thereto before removing the wires or pins. CONSTITUTION:Grooves 111-1112 coming to nozzle parts are formed to photosensitive glass 1 and copper wires 31-312 are arranged to the grooves 111-1112. Said wires are put in the grooves while the grooves are positively collapsed and the wires are connected at a slightly high temp. so as to surround said wires. After connection, unnecessary wires are cut off and, after the outer surfaces of nozzles are polished, the wires are chemically etched to form nozzle parts. By this method, uniform nozzle parts can be formed and, because the collapse of the grooves of the nozzle parts is positively utilized, the possibility of collapse thereof is eliminated and the high density arrangement of nozzles is enabled. |
