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发明名称
METHOD OF DETERMINING OPTICAL ENERGY OF IONIZATION AND TYPE OF SYMMETRY OF DEEP IMPURITY SITE IN SEMICONDUCTOR
摘要
申请公布号
SU1114262(A1)
申请公布日期
1985.11.15
申请号
SU19833538047
申请日期
1983.01.18
申请人
FIZIKO-TEKHNICHESKIJ I IM.A.F.IOFFE
发明人
KOLCHANOVA N.M.,SU;YASSIEVICH I.N.,SU
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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