| 摘要 |
PURPOSE:To make the easy forming of an ink nozzle with high precision, by a method wherein the thin layer material not masked on an insulating substrate is removed by etching and then, perforated holes are formed by etching the other surface part. CONSTITUTION:A photoresist 23 is formed on the thin layer 22 on an insulating substrate 21 and the exposure mask 24 of a specific pattern is put thereon. It is exposed to the irradiation of ultraviolet rays, developed, fixed and etching is carried out by removing the non-exposed part. Further, the photoresist 23 is removed and the hole forming a nozzle is formed. Then, the etching liquid resistant film 25 on the insulating substrate 21 is removed with other etching liquid and a photoresist 26 is provided thereon so as to have open-holes 27 which are larger than the inside diameter of thin layer material 22 and less than the outside diameter thereof. All the surface on the thin layer material 22 side is covered with the etching liquid proof film 28. The holes 29 are perforated by etching the surface and the orifices are formed. |
