| 摘要 |
PURPOSE:To permit sure and easy mounting of a permeable membrane for a detecting material by bringing an insulating film into tight contact with the inside surface of a detecting electrode and the inside surface of a silicon substrate which contacts with an electrolyte and providing plural small through-holes to the insulating film held in tight contact with the inside surface of the detecting electrode. CONSTITUTION:The insulating film 4 is brought into tight contact with the inside surface of the detecting electrode 1 and the inside surface of the silicon substrate 3 which contacts with the electrolyte. The plural small through-holes 10 having a fine diameter are provided by fine working to the film 4 brought into tight contact with the front surface of the electrode 1. A conductor 9 can be taken out directly from the rear surface side on the side opposite from the side in contact with the electrolyte if the assembly is used as a sensor and therefore the sure and easy mounting of the permeable membrane 5 for the detecting material is made possible and the easy formation of the electrode 1 to the multielectrodes in which unit electrodes are multipled is made possible. |
