| 摘要 |
PURPOSE:To reduce the weight of a device for breaking the sample in vacuum and enable analysis to be performed without suppressing the effect of vibration prevention by attaching an expander and a support base to a sample breakage chamber during sample breakage and then after breakage is completed removing these members and sending them to an analysis chamber. CONSTITUTION:An expander 14 is attached to a sample breakage mechanism 11, which is installed in the sample breakage chamber 1 of a hard vacuum sample breakage device for making a clean granular broken surface suitable for surface analysis such as Auger analysis by breaking a sample in hard vacuum, in such a manner as to be freely attached and detached. Next, after the breakage chamber 1 is exhausted to around 10<-9>Torr, a sample 20 placed on a holder 19 is sent to the breakage mechanism 11 and a support 16 is installed between the breakage chamber 1 and a stand 17. At the same time, the rod 15 of the expander 14 is connected to the top of the breakage mechanism 11 and the sample 20 is broken by the operation of the expander 14. Therefore, by moving the sample 20 to an analysis chamber 4 by removing the expander 4 and the support 16 after breaking is completed, analysis can be performed without suppressing the effect of vibration prevention. |
