| 摘要 |
PURPOSE:To elevate a detection sensibility with a simple constitution by providing respectively a temp. sensing resisting body film and each one pair of electrode films on each face of a pair of plane sheet shaped insulating substrate to constitute a pair of thin film thermistor elements and by laminating both elements on both surfaces of the thermal resisting body. CONSTITUTION:A temp. sensing resisting body film 6, 6' and a pair of electrode film 7, 7' are formed in the surface of each one side of a pair of plane sheet shaped insulating substrate 5, 5' to constitute thin film thermistor element A, B. The element A, thermal resisting body 8 and element B are in order laminated to constitute a thermal flow sensor. The plate 5 of a temp. resisting body and thermoelectric couple 3 for temp. measurement of the resisting body 8 can thus be made unnecessary. |
