| 摘要 |
PURPOSE:To attain ease of each forming work with high accuracy and good yield by forming a guide pit and a format work in separate processes. CONSTITUTION:A mother disc 11 formed with a guide pit 111 is manufactured by the known method. While the guide pit 111 is tracked by a laser 13, a laser giving sufficient exposure writes a signal to the guide pit 111 to the pit forming region for pre-format by using a photoresist 12. Since the forming of the guide pit 111 for tracking servo and the cutting of pre-formatting are conducted in separate processes, the depth of the guide pit 111 is controlled by the thickness of the resist in the guide pit (111) forming process and the development time is optimized for the finish of the guide pit 111 by using an on-line monitor. Moreover, since the process is optimized to the finish of the pre-formatting also in the pre-formatting process, the finish accuracy and the yield are improved rapidly in both the processes. |
