VAPOR-DEPOSITING METHOD OF OPTICAL INFORMATION RECORDING CARRIER

摘要

PURPOSE:To form an extremely stable vapor-deposited film by providing a detecting means for detecting the quantity of reflecting or transmitting light on a vapor-deposited surface and controlling the film thickness and a vapor-depositing speed by the detected light quantity. CONSTITUTION:A reflected light quantity detecting means 17 consisting of a light source 14 for generating light of a single wavelength, a lens 15 for condensing reflected light and a reflected light quantity detecting element 16 is provided on the upper part of an object to be vapor-deposited 1. In this state, when executing vapor-deposition by the vapor 5 from a vapor-deposition source 4, a reflecting or transmitting light quantity is detected by the detecting means 17 and the film thickness and vapor-depositing speed signal based on said detection is generated. This signal is compared with the film thickness and a vapor-depositing speed which have been set in a control part 7 and the film thickness and the vapor-depositing speed are controlled. Therefore, an extremely stable vapor-deposited film can be formed.