| 摘要 |
PURPOSE:To reduce the quantity of dust adhered to a carrier box in conveyance by a method wherein a pair of belt conveyors, which are constituted in such a manner that no dust is generated, are provided in parallel in the upper space with their travelling direction reverse to each other. CONSTITUTION:A conveying device 13 consists of a pair of conveyors 20a and 20b provided in parallel in the upper space of a common chamber 12 along a processing chamber 10. The belts of the conveyors 20a and 20b travel in reverse direction each other. The carrier box whereon a wafer is housed is temporarily placed on the first station 14 to be provided in the processing chamber 10. A robot 16, having the range of operation on the region above the conveyors 20a and 20b and the station 14, is provided on the second station provided along the conveyors 20a and 20b. The carrier box arrived at the station 15 is transferred to the station 14 by the robot 16 and, at the same time, the carrier box placed on the station 14 is transferred to a belt conveyor 13 by the robot 16. |
