发明名称 WET TYPE WASHING DEVICE
摘要 PURPOSE:To prevent the recontamination of the material to be washed and to enhance the efficiency of washing by a method wherein a surface layer of liquid flow is generated on the surface of the liquid in a vessel and the suspended contaminated substances are removed to outside of the vessel. CONSTITUTION:A liquid flow surface layer generating structure, namely, a feeding vessel 22 and a liquid branch pipe 24 which generates a liquid stream running toward an overflow part, is provided in a washing vessel 12. As a result, a washing liquid is supplied to the feeding vessel 22 by the liquid branch pipe 24, the liquid overflowed the feeding vessel 22 flows into the washing vessel 12, and runs toward a liquid exhausting part 18 in the form of a surface layer of a liquid stream. The contaminated substance 26 suspending on the surface of liquid is washed away in the direction shown by the arrows in the diagram and exhausted to the liquid exhausting part 18. As a result, the feeding of washing liquid is reduced, and the efficiency of washing is enhanced.
申请公布号 JPS60229339(A) 申请公布日期 1985.11.14
申请号 JP19840084994 申请日期 1984.04.26
申请人 HITACHI PLANT KENSETSU KK 发明人 SAWARA TERUTAKA;YOSHIDA TADASHI;SUGIURA TAKUMI;KOMATSU YASUHIRO
分类号 B08B3/10;H01L21/00;H01L21/304 主分类号 B08B3/10
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