| 摘要 |
The invention relates to a high-vacuum molecular pump of the kind comprising at least two coaxial elements (1 and 2) mounted rotatably with respect to each other and at a small distance from each other, wherein a side of one of the elements (1) positioned opposite a side of another element (2) is provided with at least one helical groove (5), and wherein a pump space (6) is present between these two sides of the elements, which pump space (6) is in communication with a gas supply (7) and a gas discharge (10, 8).
<??>According to the invention an improved embodiment of a pump of the above kind is provided. In the pump according to the invention near an end of a pair of elements (1 and 2) a substantially annular gas supply chamber (9), is present which is bounded by these elements (1 and 2), said annular gas supply chamber (9) being in communication on the one hand with the gas supply (7) and on the other hand with the pump space (6) between the two elements (1 and 2), the helical groove (5) extending into the annular gas supply chamber (9), wherein the elements (1 and 2) bounding the annular gas supply chamber (9) are so shaped that the annular gas supply chamber (9) is relatively wide near the gas supply (7), but narrows gradually downstream. |
