| 摘要 |
PURPOSE:To easily manufacture the semiconductor products of multikinds in small quantities with high productivity by a method wherein the control of conveyance is performed for every wafer. CONSTITUTION:The recognition of patterns formed on each of a number of wafers is performed by attaching a bar code on the back side of the wafers, for example. The bar code of each wafer carried to an oxidizing treatment part by an automatic conveying mechanism is read out by a photosensor, and the prescribed signal is outputted to a process controlling computer. As the computer knows the position of each wafer by real time, the waiting time of the wafer to be supplied to the oxidizing treatment part and the average processing time of a wafer are calculated by the computer, the number of sheets of the wafers with which the minimum value of said average processing time can be determined, and the prescribed signal is outputted to the automatic conveying mechanism from the computer. As a result, the semiconductor products of multikinds in small quantities can be easily manufactured with high productivity. |
