| 摘要 |
PURPOSE:To measure the heat expansion coefficient of a specimen having said coefficient equal to or less than that of quartz rods or that of the specimen on a thin film with good accuracy, by using the quartz rods having the same quality and volume equipped with sensors on the same base stand. CONSTITUTION:A quartz rod 15 equipped with a sensor 16 is placed on the specimen 14 to be measured on the base stand in a heater 2 of which the temp. is controlled by a temp. controller 1 and a quartz rod 25, which has the same quality and volume as the quartz rod 15, equipped with a sensor 26 is placed on said base stand 13. The displacement of the quartz rod 15 and the specimen 14, and that of the quartz rod are detected by externally attached sensors 17, 27 and the difference between displacements detected by the sensors 17, 27 is displayed as the displacement of the specimen 14 on an X-Y recorder 18 along with temp. By using the quartz rods 15, 25 having the same quality and volume as the same base stand 13, the effect of the thermal expansion coefficient of the base stand by temp. can be disregarded and the difference of displacements comes to that of only the specimen 14 as it is. |
