IMAGE MEASURING SYSTEM

摘要

A solid state image sensing device of the line scan type is primary scanned in a direction of the alignment of sensor elements and auxiliary scanned mechanically in a direction perpendicular to the primary scanning to produce an image signal of a sample containing a plurality of objects to be examined. Image signals respectively obtained in two successive primary scannings are correlated with each other in a measuring circuit to determine whether an image portion sensed in one of the two primary scannings is in continuity with any one or more of the image portions sensed in the other primary scanning. By repeating this process of correlation between two successive primary scannings sequentially until the whole surface of the sample is scanned, the area and shape of each of images of the objects are measured. An output correction circuit corrects the image signal from the solid state image sensing device with respect to the output irregularity due to differences in sensitivity of sensor elements and due to non-uniformity of illumination of the objects.