| 摘要 |
PURPOSE:To conduct accurate measurement by constituting a structure of a temperature measuring sensor of a die bonder for measuring the surface of a package using an attachment unit supporting a thermo-couple at the lowest part of a shank, held by a collet holder, by a spring body. CONSTITUTION:A shank 21 composed of insulator is fixed to a collet arm of a die bonder, and similarly a hollow rectangular sensor mounting portion 22 is mounted on the collet arm to insert a termo-couple 23 thereinto. A shallow duct 24 is made on the face opposite to that of the mounting portion 22 in the lengthwise direction. A through hole 25 is bored in the duct, both ends of a leaf spring 26 holding down the tip of the thermo-couple 23 are bent and pushed into the duct 24, and the tip of the leaf spring is inserted into the hole 25 to fix it thereto. Thus, since the tip of the termo-couple 23 is held by the leaf spring 26, the contact pressure and the contact angle to the tip of the thermo- couple are made constant, thereby to reduce errors in measurement and obtain good reproducibility in measurement. |
