| 摘要 |
PURPOSE:To enable measurement of a displacement mode of a sample with just one operation by scanning the electron image in an image dissector in the direction approximately perpendicular to the direction for measuring the displacement. CONSTITUTION:Saw tooth wave current is supplied to a horizontal deflecting coil 8 and the electron image formed on the plane of a disk to which an aperture 6 is provided is moved horizontally while the operation for measuring the displacement is made continuously by the image 1' of a mark 1. The displacement in the vertical direction at each part from the point A to the point B of the sample (a) is eventually and continuously detected and therefore the current shown by (c) is obtd. if the correcting current flowing in a vertical deflecting coil 9, i.e., the current indicating the displacement quantity, is measured by a synchroscope. The measurement of the displacement mode of the sample (a) is thus made possible. |
