FLOW CONTROL VALVE

摘要

PURPOSE:To control the flow precisely under high speed by applying the bias voltage and the control voltage simultaneously onto all Piezo elements and choking the opening of valve seat with valve body when the control voltage is zero. CONSTITUTION:A drive unit 22 is made by laminating a plurality of Piezo elements 23 through thin electrode plates 24 of same shape in the direction of thickness. Control signal from a control signal source is applied thrugh an amplifier onto the Piezo element group 23 in parallel. Upon application of bias voltage onto all Piezo elements 23 in parallel, the valve body 3 will choke the opening of valve seat 9. Upon variation of the voltage to be applied onto the Piezo elements through variation of control voltage, that voltage will never exceed over the bias voltage thus to vary the extension of the drive unit 22 linearly in the decreasing direction.