| 摘要 |
PURPOSE:To increase transmission efficiency for light energy by forming a planar type light emitting/photodetecting element consisting of a semiconductor member and forming a recessed hole concentrically with the light emitting/ photodetecting part on the surface opposite from the surface on which said element is formed. CONSTITUTION:An optical fiber 20 is inserted into a capillary 12 while a fiber sheath 23 is matched thereto, then the end face thereof can be conducted to the p-n junction part on the bottom surface of a p type diffusion part 2 of the optical element by adjusting the positional deviation resulted from fixing of the optical element, etc. with the taper recessed hole provided to an n type substrate 1 of the optical element as a guide and utilizing the flexibility at the top end of the optical fiber. The incident and exit light to and from the core part 21 is therefore effectively conducted to the optical element even if the outside diameter 22 in the glass part of the optical fiber is small. The taper hole for matching the position is formed by using a wafer having a face (100), forming a pattern corresponding to the inlet diameter of a guide hole 9 and using a material having the higher resistance to etching than silicon such as SiO2 as a resist to form the hole 9.
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