APPARATUS FOR PRODUCING MASTER DISK FOR REPRODUCTION OF INFORMATION RECORDING CARRIER

摘要

PURPOSE:To enable uniform coating of photoresist on a glass master disk in short time by installing nozzles for dropping the photoresist at >=2 points spaced from each other and controlling the flow rate of the photoresist with each of the nozzles. CONSTITUTION:The photoresist to be supplied from the same tank is dropped at 1.5-4.0 times higher flow rate from the nozzle 3' on the outside circumferential side if the flow rate from the nozzle 3 on the inside circumferential side is assumed to be 1 to cover the increase in the coating area of the outside circumferential part. An arm 4 and an arm 4' move simultaneously toward the outside circumferential direction during dropping but the moving distance is required to be half the distance in the conventional practice and the reduction of the dropping time by half is made possible if the nozzles are provided at two points. The master disk which is uniformly coated with the photoresist without drop-out and is decreased in defects as a result of the reduced dropping time is thus obtd. and the provision of the master disk for reproduction of the information recording carrier having high quality at a high yield is made possible.