| 摘要 |
PURPOSE:To enable forming of a thin film which has extremely good reproducibility of distribution of film thickness due to a constant divergent angle of vapor by providing a lid with plural through holes covering an evaporated material inside an evaporation source crucible. CONSTITUTION:A lid 5 which has slits 6 is placed on a supporter 7 inside a crucible 1 and below the lid 5, a material 4 to be evaporated is placed. Vapor from the crucible passes through the lid 5 and the divergent angle theta3 does not depend upon the surface of the evaporated material 4 liquid so distribution of film thickness is only related to the lid, the shape of the crucible and the position of a substrate whereby the distribution of film thickness which has extremely good reproducibility can be obtained. |
