| 摘要 |
PURPOSE:To obtain an element having numerous winding numbers and large inductance value by only forming a linear conductor layer, an insulator layer and a magnetic body layer successively. CONSTITUTION:The first plural linear conductor layers 2 are formed by photo- etching the copper layer formed within inductance element forming region on an insulating alumina substrate 1 of a hybrid IC. Thereafter, a frame type magnetic body layer 4 is formed by printing a paste which consists of Mn-Zn as a magnetic body and polyvinly alcohol as a binder, and performing heat treatment. Subsequently, the second insulator layers 5 are formed in a manner than an SiO2 film is formed on the whole surface by means of CVD method and the SiO2 film is removed selectively by photo-etching so that the both edges 2a, 2b of the first linear conductor layers 2 are exposed. After that, the second striped linear conductor layer 6 are formed by removing selectively by photo-etching the copper layers formed by evaporation, and then a coil of 100 turns is formed by connecting one edge 6a and another edge 6b thereof to one edge 2a and another edge 2b of the first linear conductor layers 2 respectively. |
