| 摘要 |
PURPOSE:To prevent flakes from attaching to the internal wall of the reacting vessel and to facilitate maintenance of the reactor, by constituting with insulating material the frame structure which is adapted to confine reactive gas being in a plasma state. CONSTITUTION:A gas curtain structure (a structure having laminar flow in parallel or approximately parallel to substrates) or an electric field curtain structure (a structure having electric field applied in parallel or approximately parallel to formed faces of substrates) is adopted. That is, reactive gas passes through a electrode 23 with a mesh or porous shape from a supplying system 10 while plasma-discharge is generated within a cylindrical space, and unnecessary reactive products and carrier gas pass through another electrode 23' with a mesh or porous shape to an exhaust system 11 for vacuum-exhausting. Moreover, the frame structure defining the cylindrical space adopts a so-called load-lock system in which holders 5 and substrates 4 being mounted within the cylindrical space are adapted to be supplied from a preliminary chamber 1 coupled to one side of the reacting vessel and to be transferred to the preliminary chamber 1 or another preliminary chamber after plasma CVD. |
