| 摘要 |
PURPOSE:To obtain a diaphragm made of ceramic materials by mixing fine power of ceramic materials with a synthetic resin solvent, making it muddy and sintering it with microwave plasma after it is heated, pressed and preformed in a diaphragm-like shape. CONSTITUTION:Al2O3 powder having a grain size of 0.3mum is mixed with a resin solvent having a heat decomposition point of 300 deg.C or below such as paraffine and stearic acid and is kneaded in muddy. Then muddy materials are put into molds 2a and 2b made of graphite, which are slided in a mold frame 1 made of graphite, and preformed in a diaphragm-like shape under a press pressure of 1,000kg/cm<2> after they are kept at 150 deg.C by a heater 3. Finally a diaphragm material A can be obtained. Then said material A is arranged in an electric furnace, heated at 500 deg.C in order to remove resins and sintered preliminarily, thereby obtaining a diaphragm material B. Then said material B is placed on a supporting stand, and the microwave plasma sintering is executed, thereby obtaining a diaphragm. |
