| 摘要 |
PURPOSE:To prevent the lines produced when a magnetic recording medium is produced as well as the cracks of a ferromagnetic metallic thin film, by providing a substrate tension detector between guide rolls to keep the even tension in the driving direction of the entire width of a substrate. CONSTITUTION:A ferromagnetic material 14 is heated and evaporated by an evaporation source 13, and the oblique incident vapor deposition is carried out to a substrate by means of a vapor deposition plate 15. a substrate tension detector A consists of a roll 16 and a support arm 17, and the roll 16 is revolved with a touch to the substrate 6 which is driven between guide rolls 9 and 10. When the extending deformation is detected with the substrate 6 having a contact with the right end part of the roll 16, the left end part of the roll 16 is pulled by the substrate 6 and revolved counterclockwise. Thus the tension difference of the substrate 6 is detected. Based on this tension difference, both rolls 9 and 10 are controlled properly by an interlocking mechanism so that no tension difference is produced in the driving direction of the entire width of the substrate 6 to the parallelism of both rolls according to the extending deformation of the substrate 6. Therefore no line is produced to the substrate 6 and no crack is produced to a ferromagnetic metallic thin film layer formed on the substrate 6.
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