发明名称 FORMING METHOD OF MONOMOLECULAR DEPOSITED FILM
摘要 PURPOSE:To form a hetero-deposited film, in which molecular layers of a different kind are arranged regularly, in a short time by preventing the mutual mixing of two kinds or more of mutually different monomolecular layers, vertically moving a substrate capable of relatively shifting in the horizontal direction with the monomolecular layers in a liquid and laminating the mutually different monomolecular layers in succession. CONSTITUTION:A frame 2a is positioned horizontally on the inside of a square- water tank 1 so as to partition water surfaces 3a, 3b. A substrate holder 8 to which a substrate 7 is fitted can be moved on a rail 23 left and right by a motor in a moving section 22 through a vertical rail 20. The substrate 7 is sunk under water, a constituent such as A in a monomolecular film is dropped to 3a and B to 3b, and surface tension is given by buoys 4a, 4b, thus forming monomolecular films A, B. The substrate 7 is shifted vertically or the inside of water is moved left and right, and the films A, B are attached, thus easily shaping a hetero-deposited film as shown in the figure.
申请公布号 JPS60223117(A) 申请公布日期 1985.11.07
申请号 JP19840077528 申请日期 1984.04.19
申请人 CANON KK 发明人 MIYAZAKI TOSHIHIKO;MIZOTA ETSUKO;TOMITA YOSHINORI;MUNAKATA HIROHIDE;NISHIMURA YUKIO;EGUCHI TAKESHI
分类号 H01L51/05;B05D1/20;H01L21/208;H01L21/368;H01L49/02;H01L51/40 主分类号 H01L51/05
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