发明名称 PLASMA MONITOR
摘要 PURPOSE:To enhance detection sensitivity by removing the obstruction of plasma beam, by modulating a plasma generating power source and emitting laser beam during a period when the power thereof is zero to measure fluorescence. CONSTITUTION:The powder of the plasma generating high frequency power source 5 of a plasma utilization apparatus 3 is intermittently modulated as shown in the drawing (a) by a modulator 6. The quantity of plasma beam comes to almost zero for a period when power is zero as shown in the drawing (b). A control apparatus 10 detects the point of time when power comes to zero and a laser emitting signal is emitted to laser 1 in matching relation to this point of time to emit pulse light laser beam 2 as shown by the drawing (c). laser beam 2 enters the plasma utilization apparatus 3 from an optical window 4a to excite a specific chemical seed to be measured and issued from an optical window 4b. Fluorescence 7 as shown by the drawing (d) emitted from the excited chemical seed to be measured is taken out from an optical window 4c and condensed by a condensing system 8 to be measured by a fluorescence measuring apparatus 9.
申请公布号 JPS60222754(A) 申请公布日期 1985.11.07
申请号 JP19840078435 申请日期 1984.04.20
申请人 HITACHI SEISAKUSHO KK 发明人 OSADA HISAJIROU;KOMIYAMA YUZURU;KANEKAWA MASAO
分类号 G01N21/64;(IPC1-7):G01N21/64 主分类号 G01N21/64
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