| 摘要 |
PURPOSE:To prevent a damage of the titled glass mask caused at the time of washing or due to a concentration of static electricity, to extend its life, also to reduce a generation rate of a defective, and to shorten an inspection time, by notching a corner part of a chrome layer on the glass mask to a polygonal shape. CONSTITUTION:Many chrome layers 22 are placed on a glass mask 20 in accordance with a shape of a semiconductor chip for transferring a prescribed pattern. The chrome layer 22 is formed by laminating a CrO layer 22b on a Cr layer 22d. Also, each corner part of the chrome layer 22 is formed to a polygonal shape which has formed a notch 23 of 45 deg. against the side. Therefore, a damage caused at the time of washing or due to a concentration of static electricity is prevented and a life of the mask 20 can be extended. Also, a generation rate of a defective is reduced and the time required for the inspection can be shortened. |
