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发明名称
METHOD AND APPARATUS FOR SAMPLING A PLASMA INTO A VACUUM CHAMBER
摘要
申请公布号
EP0112004(A3)
申请公布日期
1985.11.06
申请号
EP19830306372
申请日期
1983.10.20
申请人
MDS HEALTH GROUP LIMITED
发明人
DOUGLAS, DONALD JAMES
分类号
G01N27/62;H01J49/04;H01J49/10;H05H1/46;(IPC1-7):H01J49/04
主分类号
G01N27/62
代理机构
代理人
主权项
地址
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