| 摘要 |
PURPOSE:To obtain a magnetic thin film which is excellent in magnetic characteristics and durability, and moveover, is thermally stable by a method wherein Fe, Al and Si, whose wt% have been respectively specified, are respectively used as a constituent composing of the main component of the magnetic thin film and O2, whose wt% has been also prescribed in the same manner as the above-mentioned respective constituent, is made to contain in the main component. CONSTITUTION:This main component is composed of Al of 2-10wt%, Si of 3- 16wt% and the remnant, Fe, and O2 of 0.005-6wt% is made to contain in the main component. A magnetic thin film for VTR and so forth is manufactured using the abovementioned compound. When O2 is made to contain in the main component of the magnetic thin film in such a way, its magnetic permeability in 1MHz reaches as high as more than 5,000 compared to a magnetic thin film of a main component, wherein O2 has not been contained, and its Vickers hardness is also increased as high as more than 1,000. Moreover, a magnetic thin film, whose saturation magnetic flux is 11,000Gauss and coercive force is also as high as 0.3Oersted, is obtained by such a way. |
