| 发明名称 |
NATURAL LITHOGRAPHIC FABRICATION OF MICROSTRUCTURES OVER LARGE AREAS |
| 摘要 |
<p>Large area random and mosaic arrays of identical submicron microcolumnar structures can be produced on surfaces by directionally ion etching a monolayer film of spherical colloidal particles.</p> |
| 申请公布号 |
CA1196308(A) |
申请公布日期 |
1985.11.05 |
| 申请号 |
CA19820417775 |
申请日期 |
1982.12.15 |
| 申请人 |
EXXON RESEARCH AND ENGINEERING COMPANY |
发明人 |
DECKMAN, HARRY W.;DUNSMUIR, JOHN H. |
| 分类号 |
B41M5/24;G03F7/004;G03F7/16;H01L21/308;(IPC1-7):H01L21/306 |
主分类号 |
B41M5/24 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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