| 摘要 |
A turbomolecular pump for counterflow leakage tests and the method of its use arranges two, tandem turbomolecular pump stages for pumping toward each other and connects opposite ends of the tandem pump stages respectively to a container or test tank through which a test gas is provided when there is a leak and a detector for detecting the test gas. A connection between the tandem pump stages connects to a forepump for assisting the turbomolecular pump. Arranging the turbomolecular pump in this way permits different pressures in the container or test tank and detector, as is often desired when, for example, the detector is a mass spectrometer, without partition and conduit arrangements therefor.
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