| 摘要 |
PURPOSE:To keep uniformity of an evaporated film by a method wherein a revolving susceptor, on which a substrate is placed and located inside a reaction furnace, is supported to a radial direction by a magnetic bearing. CONSTITUTION:After the substrate (not shown in the figure) on a revolving susceptor 15 is heated by infrared lamps 29, an electric power is applied to the exciting coil of magnetic bearings 17a, 17b and an electromagnet 25 simultaneously. At this time, the rotary shaft 16 united with the revolving susceptor 15 by repulsive force between the electromagnet 25 and a permanent magnet 24, is levitated and the rotary shaft 16 is supported in radial direction without contact with the other materials by the self-control type magnetic bearing 17a, 17b. Hereafter, reaction gas is supplied (X direction) into the reacting furnace and the torque from driving source is transmitted to the rotary shaft 16 through the magnetic joint consisting of permanent magnets 28a, 28b. By doing this, as abraded powder is not generated from the rotary shaft 16 even if it rotates the homogeneity of the evaporated film which is formed on the substrate is ensured. |
