| 摘要 |
PURPOSE:To obtain a long magnetic recording medium which is uniform over its entire length with use of a substrate in a low temperature, by forming a magnetic layer on a moving polymer substrate at a speed higher than a specific formation speed by a magnetron sputtering process. CONSTITUTION:A substrate 8 for recording medium is moved to a take-up shaft 11 from a feed shaft 10 along a cylindrical can 9. At the same time, a nonmagnetic thin endless belt of Ti, stainless, etc. is driven. Thus a target carrier 12 is revolved toward an arrow head along cooling rolls 18, and a thin film target vapor-deposited on the carrier 12 is sputtered to the substrate 8 by means of a magnetic field generator 17 of an electromagnet, etc. The target thin film is obtained by charging a vapor deposition material 13 such as Co-Cr, Co-V, etc. into a container 14 and vapor-depositing a steam current 15 to the carrier 12 with steam applied by electrons produced by an electron beam generating source 16. In such a way, a magnetic film is formed on the substrate 8 at a speed higher than 5mu/min. Thus it is possible to obtain an excellent uniform magnetic recording medium.
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