| 摘要 |
<p>PURPOSE:To speed up processing by constituting a rotation command part which controls an inspection direction according to the pattern array shape of a body to be inspected so that the scanning direction of the object body can be determined and the array of inspection data is changed. CONSTITUTION:A reticle 1 as the body to be inspected has numbers of thin and long patterns 2 on the surface in the Y direction and placed on a table 4 which rotates on an XY table 3 moving in the X and Y directions by theta>=90 deg., and the pattern detection part 5 having the detecting element 11 composed of a light source 6, lenses 7 and 8, half mirror 9, rotary mirror 10, and linearly arrayed CCDs is provided over the reticle 1. The detecting element 11 detects the pattern over the entire surface of the reticle 1 by utilizing the rotation of the rotary mirror 10 and the XY table 4 in combination. The detecting element 11 is connected to a comparison part 12, which is supplied with pattern data from a basic data part 13 to compare both patterns and inspect whether the both coincide with each other or not, thereby outputting the result to a display device 14 as a pattern conforming/nonconforming decision result.</p> |
