| 摘要 |
PURPOSE:To obtain an electrode, which can effectively concentrate discharge energy to a main discharge section and enables the operation of a laser in sealed state, by coating a dielectric while combining an inorganic insulator, from which an impurity gas is not generated, and an organic insulator abounding in flexibility. CONSTITUTION:Sections except the opposite surfaces of dielectric electrodes 3, 4 are coated with an insulator, discharge energy is concentrated efficiently to a main discharge section, and double layer structure in which the insulator is coated with an inner layer section 8 having flexibility and an outer layer section 11 in which the inner layer section 8 is shaped by an inorganic insulator, from which an impurity gas is not generated even when the insulator is in contact with discharge, is formed. The inorganic insulator 11 is bonded with the insulator such as an silicone rubber group insulator 8 coating a dielectric 4, or the metallic electrode 3 and the dielectric 4 are fixed in the inorganic insulator 11, and the silicone rubber group insulator 8 is flowed in and the metallic electrode 3 and the dielectric 4 are molded. Accordingly, no impurity gas is generated by the effect of discharge, and an electrode for a silent discharge type gas laser device in which an output from a laser is hardly reduced even when operation in sealed state for a prolonged time is conducted continuously is obtained. |
