| 摘要 |
<p>PURPOSE:To improve low resistance value accuracy and reduce the cost by inserting a lead into both end opening parts of a ceramic bobbin formed by vapor- depositing platinum resistance and connecting it to a platinum film, and then forming a spiral groove in the platinum film by laser work. CONSTITUTION:When the sensor is manufactured, platinum resistance 2 is formed on the external surface of cylindrical ceramic 1 by vapor deposition firstly and then a lead 3 is inserted into both end opening parts of the ceramic bobbin 1 and connected with conductive paste 5 such as platinum paste 5. Then, the spiral groove is formed in the platinum film by laser work to obtain a desired resistance value, and the external surfaces of the platinum resistance 2 and conductive paste 5 are coated with polyimide resin or glass to form a protection film 4. The external diameter of the ceramic bobbin 1 is set to <=1mm. to reduce the thermal capacity and shorten a response time, and set >=3 times the length to improve the sensitivity.</p> |
