| 摘要 |
<p>A micro-dimensional measurement apparatus is disclosed, for non-contact measurement of the distance between edges formed upon a surface (42) to a high degree of accuracy. The apparatus basically comprises means (22-26) for scanning a light beam (34) across the surface with the scanning distance varying in accordance with a deflection voltage, and means (39, 46, 48) for sensing the intensity of resultant light reflected from the surface (42) and for determining when the rate of change of the reflected light intensity reaches a maximum value. Each of such maximum values represents an edge on the surface (42), and the distance between two edges is computed from the change in deflection voltage occurring between the corresponding maximum values.</p> |
