| 摘要 |
PURPOSE:To grind accurately the back surface without causing flaws in its surface by fixing the signal surface of a metallic stamper, protected by a protection coat to a discoidal metallic plate coated by a release sheet through a both-sides adhesive sheet under a specific condition in grinding the back surface of the stamper. CONSTITUTION:A release sheet 3 having an uniform film thickness and a diam. larger than the outer diam. of a metallic stamper is arranged on the central part of a discoidal metallic plate 4, and a both-sides adhesive sheet 2 is stuck onto the whole surface of plate 4 so as to cover the sheet 3. Further, a protection coating 5 is provided to the signal surface of stamper 1 to fix the signal-surface side of stamper 1 to the central part of sheet 3 through the sheet 2. The back surface of stamper 1 is ground in this state by a polishing or a lapping method, before cutting the outer-diam. end-face of sheet 3 and separating the stamper 1 from the plate 4. Successively, the protection coat 5 is stripped off from the signal surface of stamper 1. |
