| 摘要 |
PURPOSE:To reduce residual impurity gas by exhausting the inside of electron tube, thereafter supplying and exhausting once or more the predetermined gas to/from electron tube, supplying the predetermined gas up to the predetermined pressure and thereafter sealing the tube. CONSTITUTION:First, a valve 5b is closed while valves 5a, 5c are opened, and an electron tube 3 is exhausted. After the valve 5a is closed and a valve 5b is opened and thereby the specified gas is supplied to the electron tube 3 from a gas supplier 2. The valve 5b is then closed, the valves 5a, 5c are opened again and the electron tube 3 is exhausted by an exhaustion apparatus 1. Thereafter, the valve 5a is closed, while the valve 5b is opened, the specified gas is supplied to the electron tube 3 only up to the predetermined pressure, a piping section between electron tube 3, the valve 5c is sealed and the electron tube 3 is separated. When a gas sealed electron tube is manufactured as described above, residual gas when the specified gas is supplied first is mixed with the specified gas and its divided pressure is very low and can be set easily as low as 10<-4>- 10<-6>. Moreover, amount of impurity gas is very reduced. |
