发明名称 |
Silicon source component for use in molecular beam epitaxial growth apparatus |
摘要 |
A quantity of silicon serving as a source of the element silicon for use in a molecular beam epitaxial growth apparatus where the silicon is in the form of a monocrystalline wafer with a plurality of electrically parallel filaments separated by slots that pass completely through the wafer, each filament having a length dimension that is greater than the width and height dimensions, joined at a broad contact area at each filament end and where an electric current is passed through the filaments through the broad contact areas.
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申请公布号 |
US4550047(A) |
申请公布日期 |
1985.10.29 |
申请号 |
US19830501571 |
申请日期 |
1983.06.06 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
JACKSON, THOMAS N.;KIRCHNER, PETER D.;PETTIT, GEORGE D.;ROSENBERG, JAMES J.;WOODALL, JERRY M.;WRIGHT, STEVEN L. |
分类号 |
C01B33/02;C30B23/02;C30B23/06;C30B23/08;C30B29/06;H01L21/203;(IPC1-7):B32B3/10;C30B23/04 |
主分类号 |
C01B33/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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