发明名称 Silicon source component for use in molecular beam epitaxial growth apparatus
摘要 A quantity of silicon serving as a source of the element silicon for use in a molecular beam epitaxial growth apparatus where the silicon is in the form of a monocrystalline wafer with a plurality of electrically parallel filaments separated by slots that pass completely through the wafer, each filament having a length dimension that is greater than the width and height dimensions, joined at a broad contact area at each filament end and where an electric current is passed through the filaments through the broad contact areas.
申请公布号 US4550047(A) 申请公布日期 1985.10.29
申请号 US19830501571 申请日期 1983.06.06
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 JACKSON, THOMAS N.;KIRCHNER, PETER D.;PETTIT, GEORGE D.;ROSENBERG, JAMES J.;WOODALL, JERRY M.;WRIGHT, STEVEN L.
分类号 C01B33/02;C30B23/02;C30B23/06;C30B23/08;C30B29/06;H01L21/203;(IPC1-7):B32B3/10;C30B23/04 主分类号 C01B33/02
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