DECOMPOSING DEVICE BY GLOW DISCHARGE

摘要

PURPOSE:To form uniformly a deposition film having good quality on base bodies by contg. plural pieces of the base bodies into electrodes for impressing discharge voltage and maintaining the specified distance between the inside circumferential surface of the electrodes and the depositing surface of the base bodies over the entire depositing surface. CONSTITUTION:A decomposing device by glow discharge is so constituted that the reactive gas introduced through a gas introducing port 57c into the space 59 in electrodes 57 flows through many gas leading-out holes 53 provided to the inside walls 57a to the discharge space 58 formed between the inside circumferential surface 57d of the wall 57a and the surface (depositing surface) of a cylindrical substrate 41 inserted coaxially therein and is discharged through a gas discharge port 52b to the outside of a vacuum vessel 52. The distance between the surface 57d of the electrode 57 and the depositing surface of the body 41 is made substantially specified over the entire depositing surface. Decomposition by glow discharge is executed in this state by which the good film is uniformly formed on the depositing surface of the base bodies 41.