| 摘要 |
<p>PURPOSE:To prepare continuously a silane compound having a desired high purity efficiently, by subjecting a silicon hydride chloride of a raw material to disproportionation reaction by the use of a catalyst consisting of a tertiary aliphatic hydrocarbon-substituted amine and its hydrochloride, separating and circulating the catalyst. CONSTITUTION:A silicon hydrogen chloride such as SiHCl3, etc. is fed from the conduit 4 to the reaction column 1. In the reaction column 1, it is subjected to disproportionate reaction by the use of a catalyst consisting of a tertiary aliphatic hydrocarbon-substituted amine shown by the formula I or II such as tri n-octylamine, etc. and its hydrochloride and simultaneously separated by distillation. A gas evolved by the reaction is transferred upward, sent through the condensers 3 and 6, and recovered in the form of liquid in the storage tank 7. High- boiling components such as SiHCl3, SiCl4, etc. prepared by the reaction and the catalyst are extracted in the evaporation tank 9. SiHCl3, SiCl4, etc. are evaporated, collected by the condenser 11, and recovered in the storage tank 12. The catalyst is extracted by the pump 10, and circulated through the reaction column 1.</p> |
