| 摘要 |
PURPOSE:To obtain high-purity silicon monoxide powder in high productivity, by bringing silicon metal powder into contact with oxygen in a plasma jet, quenching it to give a reaction product, distilling the reaction product at a specific temperature. CONSTITUTION:The closed container 7 is in an inert gas atmosphere, and a mixed gas of Ar and H2, etc. is made to flow in the passageway 4 between the anode 2 and the cathode 3. An electric current is made to flow between both the electrodes 2 and 3 to generate plasma, and the plasma jet 11 is jetted into the container 7. Silicon metal powder is fed to the plasma jet 11 at a feed amount of >=70g/min by the use of a carrier gas such as oxygen. Consequently, the reaction flame 12 is formed, and the silicon powder is brought into contact with oxygen, to synthesize vapor of silicon monoxide. It is hit to the water cooling steel plate 10, etc. and quenched. The prepared crude silicon monoxide composition is sent to the evaporating chamber 14 of the distillation furnace 13, evaporated under heating at 1,400-1,800 deg.C, introduced the collecting chamber 15 at reduced pressure, to obtain high-purity silicon monoxide powder.
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