PRODUCTION OF THIN FILM MAGNETIC HEAD

摘要

PURPOSE:To form a magnetic pole by an efficient lift-off method by covering the part except the part to be formed as the magnetic pole with an org. or inorg. material and disposing further a mask thereon then sticking a thin film to be formed as the magnetic pole and removing the thin film except in the part to be formed as the magnetic pole thereby forming the magnetic pole. CONSTITUTION:A pattern is formed of resist 3-2 on a substrate 3-1 and the resist 3-2 is removed only from the part 3-3 to be formed into the required magnetic pole. The mask 3-4 made of a stainless steel is then disposed thereon. Co-Zr-Nb 3-5 to be made into the magnetic pole of a thin film magnetic head is stuck thereto by a sputtering method. The mask 3-4 is removed. The resist 3-2 is exposed in the part 3-6 in this stage. The substrate is dipped in a liquid 3-7 for stripping the resist 3-2 in succession thereto. The thin magnetic film 3-8 sticking on the resist 3-2 is also removed by stripping the resist 3-2 and the thin magnetic film remains only on the part 3-3 to be used as the magnetic pole.